Semi Conductor Wafer Transportation

The customer needs

Mobile Manipulator(MOMA) is one of the most important development trends of robot in near future, which is just like to attach legs to cobot to make it travel easily, freely and swiftly. The TM cobot is the best option for Mobile Manipulator, as it is able to precisely orient and guide the robot to go to the accurate position for all the subsequent actions through its international patent technology, Landmark and built-in vision, which would definitely save a lot of your time and expense on vision’s R&D.
MOMA is very swift, and shall not be limited to the work room and place, Meanwhile, to securely interactive with human being working in the same room through cobot, sensor, laser radar, pre-set route, Active obstacle avoidance, the optimized algorithm etc. MOMA definitely shall complete tasks of transportation, loading and unloading during different work stations remarkably

TM Mobile Manipulator advantage

1. Fast Set up, no need much room

2. Automatically plan the route with the laser radars and optimized algorithm

3. Collaborative with between human being and robot

4. Easily programming to flexibly meet future’s needs

5. Unmanned technology, On-Board battery

6. 24 hours unattended operation through automated charge station

7. Realized the switchover between different EOAT for the robot

8. By built-in vision on the cobot arm, no need to spend extra time and expense to set up the vision for the cobot

9. By built-in vision and Landmark technology(TM cobot’s patent),To realize precisely the orientation and the motion

Soution Features

（Advantages of Collaborative Robots in Semi Conductor Wafer Transportation）

High Precision

Cobots achieve sub-micron accuracy in handling wafers, reducing errors and improving quality stability.

Efficient Automation

They operate 24/7 with minimal downtime, enhancing equipment utilization and production efficiency.

Flexibility

Cobots can adapt to different wafer sizes and tasks by changing end-effectors and reprogramming.

Safety and Cleanliness

Designed for cleanroom compatibility, cobots maintain high cleanliness standards and reduce contamination risks.

Cost-Effectiveness

While reducing labor costs, cobots minimize defects and rework, improving overall production efficiency.

Mobility and Versatility

Mobile cobots can move between workstations and handle multiple tasks, increasing operational flexibility.

Real-Time Monitoring

Equipped with sensors and vision systems, cobots provide real-time feedback and optimize processes dynamically.

Reduced Human Intervention

Cobots automate wafer transportation, minimizing human contact and contamination.

Related Products

TM-16

- - Max. Payload: 16KG
  - Reach: 900mm
  - Typical Speed: 1.1m/s
  - Max. Speed: 4m/s
  - Repeatability: ± 0.1mm

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SJV-W1000

- - Max. Load Capacity: 1000kg
  - Comprehensive Battery Life: 6h
  - Positioning Accuracy: ±5, ±0.5mm
  - Rotation Diameter: 1344mm
  - Driving Speed: ≤1.67m/s

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PGS-5-5

- - - Gripping Force: 3~5.5N
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    - Stroke: 5mm
    - Opening/closing time: 0.03s
    - IP Class: IP40

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